Inline 3D-CT Automated X-ray Inspection Systems


3Xi Series

Saki's 3D-AXI (X-Ray) series adds significant inspection capability. The system utilizes Planar Computed Tomography (PCT) providing high precision CT imaging at high speed.

Product list

3Xi Series

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Model 3Xi-M110 3Xi-M200


(W) x (D) x (H) [Main body]mm (in.)
1380W x 2150D x 1500H mm
(54.34W x 84.65D x 59.06H in)
1400W x 2165D x 1862H mm
(55.12W x 85.24D x 73.31H in)
Weight Approx. 3100 Kg (6834.34 lbs) Approx. 5200Kg (11464.04 lbs)
Electric Power Requirement Three Phase ~200V +/-10%, 50/60Hz
Resolution 10μm-30μm 51μm-104μm
Tube 110kV 30W, Closed X-ray Source 180kV 90W, Closed X-ray Tube
Xray leakage 0.5μSv/h or less
Air Requirement 0.5MPa @ ≥ 20L/min (ANR)
Target PCB Size
mm (in.)
50 W x 120 L - 360 W x 330 L  
(1.97 W x 4.73 L - 14.17 W x 12.99 L)  
50 W x 120 L - 360 W x 510 L ※
(1.97 W x 4.72 L - 14.17 W x 20.07 L)※
50(W)x140(L) - 460(W) x 440(L) mm  
(1.97 W x 5.52 L - 18.12 W x 17.33 L in.)    
50(W)x140(L) - 460(W) x 600(L) mm ※
 (1.97 W x 5.52 L - 18.12 W x 23.63 L in.) ※  
Clearance Top : 60mm (2.36 in.)
Bottom : 40mm (1.57 in.)
Top : 68mm (2.68 in.)
Bottom : 40mm (1.57 in.)

※2x imaging option target board size



Saki's unique "Planar CT" technology

Acquires high-quality CT images of planar objects using fewer projections

Identifies various defects in 3D images

Enables inspection without any interference from the opposite side of the board.


Intuitive User-friendly

High accuracy true 3D automatic inspection

Displays actual measurement and target point with 3D images

Displays defects in high-precision 3D color images

The system displays 3D reconstruction, 3D inspection, and 3D image display for all captured images.


Expands the range
of inspection

Inspection of standard PCBs, components and solder joints, and other electric components

Head in Pillow (HIP)

Detection and measurement of voids in multilayer PCB power modules.

Inspection of PCBs as well as semiconductors and power modules.
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Saki's Automated X-ray Inspection (AXI) Technology

3D-AXI Technology